sugi:tepla_oxygen_plasma_machine
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| sugi:tepla_oxygen_plasma_machine [2014/10/13 14:27] – kaori | sugi:tepla_oxygen_plasma_machine [2024/02/05 11:12] (current) – removed erics | ||
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| - | =====TePla IoN 3Mz oxygen plasma machine===== | ||
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| - | Responsible person; Kaori Sugihara\\ | ||
| - | Manufacturer; | ||
| - | Swiss Supplier; \\ | ||
| - | ==== Helmut Degenbeck\\ | ||
| - | Service Einsatzleiter\\ | ||
| - | Hilpert electronics AG\\ | ||
| - | Täfernstrasse 29\\ | ||
| - | CH-5405 Baden-Dättwil\\ | ||
| - | Direkt | ||
| - | Service +41 56 483 25 00\\ | ||
| - | Fax +41 56 483 25 20\\ | ||
| - | helmut.degenbeck@hilpert.ch\\ ==== | ||
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| - | www.hilpert.ch\\ | ||
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| - | The IoN 3 MHz plasma system is a tabletop plasma chemistry reactor. It is designed to provide repeatable plasma processing for ashing, cleaning or etching. The system is connected to an oxygen supply for oxygen plasma cleaning. | ||
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sugi/tepla_oxygen_plasma_machine.1413203278.txt.gz · Last modified: by kaori