sugi:tepla_oxygen_plasma_machine
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TePla IoN 3Mz oxygen plasma machine
Responsible person; Kaori Sugihara
Manufacturer; http://www.pvateplaamerica.com/
Maual
The IoN 3 MHz plasma system is a tabletop plasma chemistry reactor. It is designed to provide repeatable plasma processing for ashing, cleaning or etching. The system is connected to an oxygen supply for oxygen plasma cleaning.
sugi/tepla_oxygen_plasma_machine.1413197572.txt.gz · Last modified: by kaori